Light emitting element display device

ABSTRACT

A display device includes two or more transistors in one pixel, and the two or more transistors include a first transistor of which a channel semiconductor layer is polycrystalline silicon, and a second transistor of which a channel semiconductor layer is an oxide semiconductor.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation-in-part of U.S. patent applicationSer. No. 14/602,909, filed on Jan. 22, 2015, which claims priority fromJapanese application JP 2014-012823 filed on Jan. 27, 2014, the entirecontents of which are hereby incorporated by reference into thisapplication.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to a light emitting element displaydevice.

2. Description of the Related Art

In recent years, light emitting element display devices usingself-luminous bodies such as organic light emitting diodes (OLED) havebeen put into practical use. As compared with the related art liquidcrystal display device, because the light emitting element displaydevices including an organic EL (Electroluminescent) display deviceusing the OLED use the self-luminous bodies, the light emitting elementdisplay device not only is excellent in visibility and response speed,but also requires no auxiliary lighting device such as backlight, andtherefore can be further thinned.

JP 2002-352955 A discloses a display device having the light emittingelements in which a drive element is formed below a bank, and a lowerlight shielding film having conductivity is formed below the driveelement, to thereby prevent a leakage current, and form a bank layer byself-alignment.

In the organic EL display device, in recent years, high definitionprogresses, to thereby reduce the size of each pixel. The organic ELdisplay device allows a current to flow by retaining a potentialdifference corresponding to a gradation value in each pixel. However, areduction in the size of pixels causes electrodes to be also reduced insize, as a result of which a capacity for retaining the potentialdifference is reduced. If the capacity for retaining the potentialdifference is small, the potential difference changes due to aninfluence of noise or an influence of slight leakage, and brightness ofthe respective pixels is varied. As a result, it is conceivable that thedisplay quality is degraded.

Recently, a demand for high definition and lower power consumption hasbeen strongly required in a light emitting display device for mobileusage. As a display device for mobile usage, for example, a liquidcrystal display device (LCD), a display device that uses a self-lightemitting element (an organic light emitting diode (OLED)) such as anorganic EL display device, and electronic paper are employed.

Among these, for the purpose of realizing a flat-screen and highbrightness, and high speed of a display panel, the organic EL displaydevice has been developed. The organic EL display device is a displaydevice which is provided with a pixel formed of the OLED, and has nomechanical operation and thus has fast reaction rate. In addition, inthe organic EL display device, light is emitted from each pixel, and theback light source is not necessary, and thus it is possible to performhigh brightness display, and to realize the flat-screen. For thisreason, the organic EL display device is expected as a next generationdisplay device in place of the liquid crystal.

Particularly, in a small and medium-sized organic EL display device,high definition of a display unit has been required. When the highdefinition of the display device progresses, a pixel size is reduced,and thus it is necessary to reduce the sizes of a plurality of TFTswhich form a pixel circuit, or a capacitor, that is, the size of acapacitor for supplying a current which corresponds to the size of avideo signal to an OLED, a thin film transistor (TFT) for writing thevideo signal into the capacitor, a TFT for supplying the current whichcorresponds to an electric charge of the capacitor to the OLED from apower line, or the like. In the TFT which writes the video signal intothe capacitor, there is a problem in that the variation of the videosignal is increased due to leakage currents, unnecessary charges, andthe like when retaining the video signal and thus the display unevennessoccurs. In addition, the TFT for supplying the current to the OLED isrequired to have large driving performance; however, an area size isreduced. Further, it is required to reduce characteristic variation dueto the application of the current.

In this regards, JP 2013-54161 A discloses a technique relating to adriving method of suppressing display unevenness caused by potentialsetting timing. However, in a full high definition smart phone, and thelike, when high definition progresses through a control method disclosedin JP 2013-54161 A, characteristics of a transistor which writes a videosignal into a capacitor are varied, thereby adversely affecting theimage quality. In addition, the driving performance of the TFT is notsufficient to supply a current to an OLED.

Further, for example, JP 2012-160679 A discloses a technique relating toa display device that uses a thin film transistor of which a channel isformed on an oxide semiconductor layer. However, in a case where the TFTof which the channel is formed on the oxide semiconductor layer is usedas a driving element for supplying a current to an OLED, there is aproblem in that an operating point is greatly varied over time.

In addition, US 2015/0055051 A, US 2015/0053935 A, and US 2010/0182223 Adisclose examples that in the organic EL display device, in a drivingtransistor for controlling a current which flows into an organic lightemitting element, an oxide semiconductor layer is used as a channel, andin a switch transistor for controlling whether or not a gradationvoltage is applied with respect to a capacitance for retaining a gatevoltage of a driving transistor, a polycrystalline semiconductor layeris used as a channel. However, a leakage current amount of thetransistor in which the polycrystalline semiconductor layer is used asthe channel is larger than that of the transistor in which the oxidesemiconductor layer is used as the channel, and thus the charge may leakfrom the capacitance for retaining the gate voltage of the drivingtransistor. Further, the current greater than that in the switchtransistor flows into the driving transistor, but the transistor inwhich the oxide semiconductor layer is used as the channel has mobilitylower than that of the transistor in which the polycrystallinesemiconductor layer is used as the channel, and is required to have anarea larger than that of the transistor in which the polycrystallinesemiconductor layer is used as the channel when the same amount ofcurrents flows at the same voltage between the gate sources.

SUMMARY OF THE INVENTION

The present invention has been made in view of the above-mentionedcircumstances, and therefore an object of the present invention is toprovide an organic EL display device that is high in display qualityeven if high definition progresses.

According to a second aspect, an object of the invention is to provide apixel circuit and a display device which are excellent in electriccharacteristics, and realize a high-quality operation of ahigh-definition pixel.

According to the present invention, there is provided a light emittingelement display device including light emitting elements that emit lightby allowing a current to flow in a plurality of pixels arranged in adisplay area in a matrix, and at least two transistors that are arrangedin each of the plurality of pixels, and control the current flowing inthe light emitting elements, in which semiconductor portions of the atleast two transistors are formed in layers different from each other. Inthe present specification, “layers different from each other” meanslayers not formed at the same time. Also, “pixel” means a unit havingthe light emitting element, and means a sub-pixel if the pixel isconfigured by plural light emitting elements to have plural sub-pixels.

Also, in the light emitting element display device according to thepresent invention, the at least two transistors may include a pixeltransistor that controls the application of a voltage corresponding to agradation value, and a drive transistor that controls light emission onthe basis of a potential applied through the pixel transistor, a firstlayer having the semiconductor portion of the drive transistor mayfurther include a first capacitor electrode made of a conductor, asecond layer having the semiconductor portion of the pixel transistormay further include a second capacitor electrode that is continuous tothe semiconductor portion of the pixel transistor, and made of aconductor forming a gate of the drive transistor, and the firstcapacitor electrode and the second capacitor electrode may overlap witheach other through an insulating layer.

In the present specification, the first layer and the second layer maybe formed of one layer formed at the same time, or may be formed of aset of plural layers including plural layers formed at the same time,for example, the combination of a layer of a semiconductor with a layerof source/drain. However, as described above, the semiconductor portionsare required to be layers not formed at the same time.

Also, in the light emitting element display device according to thepresent invention, a third layer having scanning signal lines which aregates of the pixel transistors may further include a third capacitorelectrode that is electrically independent from the scanning signallines, electrically connected to the first capacitor electrode through acontact hole, and arranged to sandwich the second capacitor electrode incooperation with the first capacitor electrode through an insulatinglayer.

Also, in the light emitting element display device according to thepresent invention, the first capacitor electrode may be electricallyindependent from the semiconductor portion of the drive transistor, andelectrically connected to a reference potential.

Also, in the light emitting element display device according to thepresent invention, the first capacitor electrode may be continuous tothe semiconductor portion of the drive transistor, and electricallyconnected to one of a source and a drain of the drive transistor made ofa conductor.

Also, in the light emitting element display device according to thepresent invention, the second capacitor electrode and the thirdcapacitor electrode maybe formed to overlap with a reference potentialline connected to a reference potential in a plan view.

Also, in the light emitting element display device according to thepresent invention, the first layer and the second layer may be made ofpolysilicon.

According to an embodiment of the second aspect in the invention, thereis provided a display device including two or more transistors in onepixel, in which the two or more transistors include a first transistorof which a channel semiconductor layer is polycrystalline silicon and asecond transistor of which a channel semiconductor layer is an oxidesemiconductor.

In addition, the pixel may include a capacitor, a gate potential of thefirst transistor maybe retained by the capacitor, and the secondtransistor may apply a potential in response to a video signal to thecapacitor.

In addition, the channel semiconductor layer of the first transistor andthe channel semiconductor layer of the second transistor may be providedon different insulating layers.

Further, the display device may further include a first insulatinglayer; a second insulating layer which is provided on the firstinsulating layer; a third insulating layer which is provided on thesecond insulating layer; a first electrode layer which is provided onthe first insulating layer, and is not electrically connected to asource or a drain of the first transistor; a second electrode layerwhich is provided on the second insulating layer, and is electricallyconnected to a source or a drain of the second transistor; and a thirdelectrode layer which is provided on the third insulating layer, and iselectrically connected to the first electrode layer, in which thechannel semiconductor layer of the first transistor is provided on thefirst insulating layer, the channel semiconductor layer of the secondtransistor is provided on the second insulating layer, and the capacitoris provided in an area in which the first electrode layer and the secondelectrode layer overlap with each other with the second insulating layerinterposed therebetween, and an area in which the second electrode layerand the third electrode layer overlap with each other with the thirdinsulating layer interposed therebetween.

In addition, the pixel may include a power line, the power line may beprovided on the insulating layer which is different from the firstelectrode layer, the second electrode layer, and the third electrodelayer, and the capacitor and the power line have an area in which thecapacitor and the power line overlap with each other.

In addition, the pixel may include a signal line, the signal line may beprovided on the insulating layer which is different from the firstelectrode layer, the second electrode layer, and the third electrodelayer, and the capacitor and the signal line have an area in which thecapacitor and the signal line overlap with each other.

Further, the channel semiconductor layer of the first transistor and thechannel semiconductor layer of the second transistor may be provided onthe same insulating layer.

According to the second aspect of the invention, there is provided amethod of manufacturing a display device including forming a firstinsulating layer on a TFT substrate; forming a first transistor of whicha channel semiconductor layer is polycrystalline silicon on the firstinsulating layer; forming a second insulating layer on the firstinsulating layer and the first transistor; and forming a secondtransistor of which a channel semiconductor layer is an oxidesemiconductor on the second insulating layer.

In addition, the method of manufacturing a display device may furtherinclude forming a first electrode layer which is not electricallyconnected to a source or a drain of the first transistor on the firstinsulating layer; forming a second electrode layer which is electricallyconnected to a source or a drain of the second transistor on the secondinsulating layer; forming a third insulating layer on the secondinsulating layer, the second transistor, and the second electrode layer;forming a via for electrically connecting the first electrode layer tothe third insulating layer and the second insulating layer; forming athird electrode layer which is electrically connected to the firstelectrode layer through the via on the third insulating layer; andforming a capacitor on an area in which the first electrode layer andthe second electrode layer overlap with each other with the secondinsulating layer interposed therebetween, and an area in which thesecond electrode layer and the third electrode layer overlap with eachother with the third insulating layer interposed therebetween.

Further, the method of manufacturing a display device may furtherinclude forming a fourth insulating layer on the third insulating layerand the third electrode layer; and forming a power line on the fourthinsulating layer, in which the power line and the capacitor have an areain which the power line and the capacitor overlap with each other withthe fourth insulating layer interposed therebetween.

In addition, the method of manufacturing a display device may furtherinclude forming a signal line on the fourth insulating layer, in whichthe signal line and the capacitor have an area in which the signal lineand the capacitor overlap with each other with the fourth insulatinglayer interposed therebetween.

According to an embodiment of the second aspect in the invention, amethod of manufacturing a display device including forming an insulatinglayer on a TFT substrate; and forming a first transistor of which achannel semiconductor layer is polycrystalline silicon on the insulatinglayer, and then forming a second transistor of which a channelsemiconductor layer is an oxide semiconductor on the insulating layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram schematically illustrating an organic EL displaydevice according to an embodiment of the present invention;

FIG. 2 is a schematic cross-sectional view taken along a line II-II ofFIG. 1;

FIG. 3 is a diagram illustrating an example of an organic EL displaydevice having no counter substrate;

FIG. 4 is a diagram illustrating a configuration example of sub-pixelsincluded in each of pixels in FIG. 1;

FIG. 5 is a diagram illustrating a configuration example of thesub-pixels included in each of the pixels in FIG. 1;

FIG. 6 is a circuit diagram illustrating an example of a circuit in eachof the sub-pixels;

FIG. 7 is a diagram schematically illustrating a layout of lines andelectrodes configuring the circuit of FIG. 6;

FIG. 8 is a schematic cross-sectional view taken along a line VIII-VIIIof FIG. 7;

FIG. 9 is a schematic cross-section view taken along a line IX-IX ofFIG. 7;

FIG. 10 is a diagram illustrating a comparative example of anembodiment;

FIG. 11 is a diagram illustrating a first modification of thisembodiment from the same view field as that in FIG. 7; and

FIG. 12 is a diagram illustrating a second modification of thisembodiment from the same view field as that in FIG. 7.

FIG. 13 is a perspective view of the display device in an embodimentaccording to a second aspect of the invention.

FIG. 14 is a plan view of the display device in this embodimentaccording to the second aspect of the invention.

FIG. 15 is a diagram illustrating a pixel circuit of the display devicein this embodiment according to the second aspect of the invention.

FIG. 16 is a plan view of the pixel circuit of the display device in afirst embodiment according to the second aspect of the invention.

FIG. 17 is a plan view of the pixel circuit of the display device in thefirst embodiment according to the second aspect of the invention.

FIG. 18 is a plan view of the pixel circuit of the display device in thefirst embodiment according to the second aspect of the invention.

FIG. 19 is a plan view of the pixel circuit of the display device in thefirst embodiment according to the second aspect of the invention.

FIG. 20 is a plan view of a pixel circuit of a display device in asecond embodiment according to the second aspect of the invention.

FIG. 21 is a plan view of the pixel circuit of the display device in thesecond embodiment according to the second aspect of the invention.

FIG. 22 is a plan view of the pixel circuit of the display device in thesecond embodiment according to the second aspect of the invention.

FIG. 23 is a plan view of the pixel circuit of the display device in thesecond embodiment according to the second aspect of the invention.

FIG. 24 is a plan view of the pixel circuit of the display device in thesecond embodiment according to the second aspect of the invention.

FIG. 25 is a cross-sectional view taken along a line XXV-XXV of a pixelof the display device in FIG. 24.

FIG. 26 is a cross-sectional view taken along a line XXVI-XXVI of apixel of the display device in FIG. 24 according to the second aspect ofthe invention.

FIG. 27 is a plan view of a pixel circuit of a display device inModification 1 of the second embodiment according to the second aspectof the invention.

FIG. 28 is a plan view of a pixel circuit of the display device inModification 2 of the second embodiment according to the second aspectof the invention.

FIG. 29 is a plan view of a pixel circuit of a display device in a thirdembodiment according to the second aspect of the invention.

FIG. 30 is a cross-sectional view taken along a line of XXX-XXX of thepixel circuit shown in FIG. 29.

FIG. 31 is a cross-sectional view taken along a line XXXI-XXXI of thepixel circuit shown in FIG. 29.

FIG. 32 is a cross-sectional view taken along a line XXXII-XXXII of thepixel circuit shown in FIG. 29.

FIG. 33 is a plan view of a pixel circuit of a display device in afourth embodiment according to the second aspect of the invention.

FIG. 34 is a cross-sectional view taken along a line XXXIV-XXXIV of thepixel circuit shown in FIG. 33.

FIG. 35 is a plan view of a pixel circuit of a display device in a fifthembodiment according to the second aspect of the invention.

FIG. 36 is a cross-sectional view taken along a line XXXVI-XXXVI of thepixel circuit shown in FIG. 35.

FIG. 37 is a plan view of a pixel circuit of a display device in a sixthembodiment according to the second aspect of the invention.

FIG. 38 is a cross-sectional view taken along a line XXXVIII-XXXVIII ofthe pixel circuit shown in FIG. 37.

FIG. 39 is a plan view of a pixel circuit of a display device in aseventh embodiment according to the second aspect of the invention.

FIG. 40 is a cross-sectional view taken along a line XL-XL of the pixelcircuit shown in FIG. 39.

FIG. 41 is a plan view of a pixel circuit of a display device in aneighth embodiment according to the second aspect of the invention.

FIG. 42 is a cross-sectional view taken along a line XLII-XLII of thepixel circuit shown in FIG. 41.

FIG. 43 is a plan view of a pixel circuit of a display device in a ninthembodiment according to the second aspect of the invention.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, the respective embodiments of the present invention will bedescribed with reference to the accompanying drawings. The disclosure ismerely exemplary, and appropriate changes that could be easily conceivedby those skilled in the art without departing from the spirit of thepresent invention are naturally included within the scope of the presentinvention. Also, in the drawings, for more clarification of theillustration, as compared with actual embodiments, widths, thicknesses,and shapes of respective parts may be schematically illustrated, but maybe merely exemplary, and do not limit the interpretation of the presentinvention. Also, in the present specification, and the respectivedrawings, the same elements as those described in the foregoing drawingsare denoted by identical symbols, and their detailed description will beappropriately omitted.

FIG. 1 schematically illustrates an organic EL display device 100 thatis a light emitting element display device according to an embodiment ofthe present invention. As illustrated in FIG. 1, the organic EL displaydevice 100 has two substrates of a TFT (thin film transistor) substrate120 and a counter substrate 150, and a filler 221 (refer to FIG. 2) madeof transparent resin is sealed between those substrates. A display area205 having pixels 210 arranged in a matrix is formed in the TFTsubstrate 120 and the counter substrate 150 of the organic EL displaydevice 100. In this example, each of the pixels 210 is configured byplural sub-pixels 212 (to be described later).

Also, the TFT substrate 120 is formed of a substrate made of aninsulating material of transparent glass or resin, and a drive IC(integrated circuit) 182 is mounted on the TFT substrate 120. The driveIC 182 is a drive circuit that applies a potential for conductingbetween a source and a drain to scanning signal lines 342 of pixeltransistors 220 (to be described later) arranged in the respectivesub-pixels 212, and also applies a voltage corresponding to a gradationvalue of the sub-pixels 212 to image signal lines 312 (to be describedlater). Also, an FPC (flexible printed circuits) 181 for inputting animage signal from the external is fitted to the TFT substrate 120. Also,in this embodiment, a top emission type organic EL display device thatemits light to a side where a light emitting layer of the TFT substrate120 is formed as indicated by an arrow in FIG. 1 is provided.

FIG. 2 is a schematic cross-sectional view taken along a line II-II ofFIG. 1. As indicated in the cross-sectional view, a TFT circuit layer160 in which TFT circuits are formed, plural organic EL elements 130which are plural light emitting elements formed on the TFT circuit layer160, and a sealing film 125 that covers the organic EL elements 130, andblocks moisture are formed over the TFT substrate 120. The organic ELelements 130 are formed by the number of sub-pixels 212 included in eachof the pixels 210. However, for easily understanding the illustration,FIG. 2 is simplified. Also, color filters that transmit light ofwavelength regions different from each other of, for example, threecolors or four colors, and a black matrix which is a light shieldingfilm that shields the light emitted from boundaries of the respectivesub-pixels 212 are formed on the counter substrate 150. The filler 221between the TFT substrate 120 and the counter substrate 150 is sealedwith a sealant 222.

In this embodiment, a configuration having the counter substrate 150 isprovided as illustrated in FIG. 2. Alternatively, a configuration havingno counter substrate 150 is provided as illustrated in FIG. 3. Also, asillustrated in FIG. 3, the drive IC 182 may be arranged on the FPC 181.In particular, if the TFT substrate 120 is made of a flexible resinmaterial, the TFT substrate 120 may be integrated with the FPC 181.Also, in this embodiment, the organic EL elements 130 emit light ofwhite, and transmit the light having the wavelength regions of threecolors or four colors using a color filter. Alternatively, the organicEL elements 130 emit the light having the wavelength regions differentfrom each other of, for example, three colors or four colors.

FIG. 4 is a diagram illustrating a configuration example of thesub-pixels 212 included in each of the pixels 210 in FIG. 1. Asillustrated in FIG. 4, each of the pixels 210 includes substantiallyrectangular sub-pixels 212 that emit the light of the wavelength regionscorresponding to four kinds of colors of R (red), G (green), B (blue),and W (white), and the sub-pixels 212 are aligned in squares in such amanner that two sides of each sub-pixel 212 come in contact with theother sub-pixels 212 within the same pixel 210. The configuration of thesub-pixels 212 in each of the pixels 210 is not limited to theconfiguration in FIG. 4, but may be a stripe configuration including thesub-pixels 212 corresponding to three colors of RGB as illustrated inFIG. 5, or a stripe configuration using four kinds of colors of RGBW.The arrangement of the sub-pixels 212 configuring the pixels 210 is notlimited to those configurations, but may be appropriately determined.

FIG. 6 is a circuit diagram illustrating an example of a circuit in eachof the sub-pixels 212. The operation of the circuit for emitting lightwill be described with reference to FIG. 6. An image signalcorresponding to a gradation value of each sub-pixel 212 is supplied toeach of the image signal lines 312, and the pixel transistor 220 isrendered conductive on the basis of the signal of the scanning signalline 342, as a result of which a voltage based on the gradation value isstored in a capacitor 241 and/or 242. The organic EL elements 130 emitlight by allowing a drive transistor 230 to flow a current based on thepotential stored in the capacitor 241 and/or 242. A cathode side of theorganic EL element 130 is connected to a low reference potential VSS,and a source side (side opposite to the organic EL elements 130 side) ofthe drive transistor 230 is connected to a high reference potential line311 retained to a high reference potential VDD.

In this example, both of the respective capacitors 241 and 242 may beformed, or any one capacitor may be formed. In this circuit diagram, ap-type semiconductor is used, but an n-type semiconductor may be used.Also, the circuit of FIG. 6 is a simple circuit for describing thecontrol of light emission, and has two transistors. Alternatively, thecircuit may be configured to have three or more transistors, or mayinclude the other control lines or capacitors. Thus, the configurationof the circuit can be arbitrarily determined.

FIG. 7 is a diagram schematically illustrating a layout of the lines andthe electrodes configuring the circuit of FIG. 6. FIG. 7 illustratesfour sub-pixels 212, and the scanning signal line 342, the image signalline 312, and the high reference potential line 311 extend in each ofthe sub-pixels 212. In FIG. 7, for the purpose of describing the circuitof each sub-pixel 212, only a layer associated with a circuit lower thanan anode electrode 350 is illustrated, and a layer structure associatedwith the light emission higher than the anode electrode 350 is omitted.Also, only a layout position of the anode electrode 350 is indicated bya dashed line.

As illustrated in FIG. 7, a first layer (331, 332) having asemiconductor portion 339 of the drive transistor 230 includes a drivetransistor channel electrode 331 having the source and drain of thedrive transistor 230 together with the semiconductor portion 339, and afirst capacitor electrode 332 electrically independent from the drivetransistor channel electrode 331, and made of an electric conductor. Thedrive transistor channel electrode 331 is connected to the anodeelectrode 350 through a contact hole 392, and also connected to the highreference potential line 311 through a contact hole 393. The firstcapacitor electrode 332 is connected to the high reference potentialline 311 through a contact hole 394.

A second layer (321, 322) having a semiconductor portion 329 of thepixel transistor 220 includes a pixel transistor channel electrode 321having the source and drain of the pixel transistor 220 together withthe semiconductor portion 329 formed in a portion overlapping with thescanning signal line 342, and a second capacitor electrode 322 that isformed continuously to the pixel transistor channel electrode 321, andoverlaps with the first capacitor electrode 332 in a plan view. Thepixel transistor channel electrode 321 is connected to the image signalline 312 through a contact hole 391.

A third layer (341, 342) having the scanning signal line 342 includes athird capacitor electrode 341 that is electrically independent from thescanning signal line 342, electrically connected to the first capacitorelectrode 332 through a contact hole 395, and arranged to sandwich thesecond capacitor electrode 322 in association with the first capacitorelectrode 332 through insulating layers 163 and 165 (refer to FIGS. 8and 9). The high reference potential line 311 and the image signal line312 are formed over the third layer (341, 342) through an insulatinglayer 166.

In this embodiment, the first layer (331, 332) and the second layer(321, 322) are made of polysilicon, the amount of ion implantation ischanged by the semiconductor portion 339, the semiconductor portion 329,and other portions to form a semiconductor portion and a conductorportion. Therefore, those “layers” in this embodiment are films formedin the same process at the same time. However, even if the source anddrain and the semiconductor layer are formed in layers different fromeach other with the use of another semiconductor material such asamorphous semiconductor or an oxide film semiconductor, the “layer” ofthe first layer or the second layer is configured by a layer includingthe plural layers of the source and drain and the semiconductor layerwhereby this embodiment can be applied to this configuration. Therefore,the first layer to the third layer may be each formed of a compositelayer including the plural layers, and particularly the first layer andthe second layer may be each formed of a composite layer including thesemiconductor layer and the conductor layer of the source/drain.

Also, ends of the first layer (331, 332) and the second layer (321, 322)are formed at a distance from the semiconductor portion or theconnection portion such as the contact holes, and the amount of ionimplantation on the ends is reduced with the result that a so-called LDD(low doped drain) structure that reduces an electric field generated inthe crystal grain boundary may be used. Also, the high referencepotential line 311, the image signal lines 312, and the conductorportion of the third layer can be made of metal such as Al, Cu, Au, Ti,Mo, or W, or organic material having the conductivity such as dopedpolysilicon. Further, the high reference potential line 311 and theimage signal lines 312 may be formed by lines having a Ti/Al/Tistructure in which Al is sandwiched between Ti.

FIG. 8 is a schematic cross-sectional view taken along a line VIII-VIIIof FIG. 7. In FIG. 8, films upper than a pixel separation film 135 thatis formed to cover an end of the anode electrode 350 with resin, andisolates between the anode electrodes 350 of the adjacent sub-pixels 212are omitted. As illustrated in this cross-sectional view, the firstlayer (331, 332) is formed on a base film 161 made of an insulatingmaterial such as SiNx, and includes the drive transistor channelelectrode 331 and the first capacitor electrode 332, and the firstcapacitor electrode 332 is connected to the third capacitor electrode341 of the third layer (341, 342) through the contact hole 395 opened inthe insulating layers 163 and 165. The second capacitor electrode 322 ofthe second layer (321, 322) is formed between the insulating layers 163and 165 made of an insulating material such as SiNx, and the capacitor241 in the circuit diagram. of FIG. 6 is formed by the first capacitorelectrode 332, the second capacitor electrode 322, and the thirdcapacitor electrode 341.

FIG. 9 is a schematic cross-sectional view taken along a line IX-IX ofFIG. 7. As illustrated in this cross-sectional view, the drivetransistor channel electrode 331 is connected to the high referencepotential line 311 formed in the same layer with the image signal line312 on the insulating layer 166 through the contact hole 393, and alsoconnected to the anode electrode 350 formed on a planarization film 168made of resin such as acrylic or polyimide through the contact hole 392.An overlap portion of the drive transistor channel electrode 331 withthe pixel transistor channel electrode 321 forms the semiconductorportion 339.

As described above, according to this embodiment, because thesemiconductor portion 339 of the drive transistor 230 and thesemiconductor portion 329 of the pixel transistor 220 are formed in thefirst layer (331, 332) and the second layer (321, 322), respectively, alarger capacitor electrode can be formed, the potential difference canbe more stably retained, and display can be performed with higherquality. Also, because a space can be efficiently used in each of thesub-pixels 212, even if the higher definition progresses, the largercapacitor electrode can be provided, and display can be performed withhigh quality.

In the above embodiment, the structure having the third capacitorelectrode 341 is provided. However, if a more sufficient capacitor canbe formed by the first capacitor electrode 332 and the second capacitorelectrode 322, the third capacitor electrode 341 may not be provided.Also, in the above-described embodiment, a case in which two transistorsare present in each of the sub-pixels 212, and two semiconductor layersare provided has been described. Alternatively, three or moretransistors may be provided, or three semiconductor layers may beprovided.

FIG. 10 is a diagram illustrating a comparative example of the aboveembodiment. In a comparative example of FIG. 10, the semiconductorportion 339 of the drive transistor 230 and the semiconductor portion329 of the pixel transistor 220 are formed in the same layer. When thesemiconductor portions 339 and 329 are formed in the same layer in thisway, a jumper wiring 317 and contact holes 491, 492 for connecting thepixel transistor channel electrode 321 and the third capacitor electrode341 are required. Those components are required for improving themanufacture efficiency by performing a process of opening the contactholes at the same time, but cause the structure of the sub-pixels 212 tobe complicated, and the yield of products to be deteriorated. Also,because the pixel transistor channel electrode 321 and the drivetransistor channel electrode 331 are formed in the same layer, not onlyone capacitor electrode is formed in the same layer as those layers, butalso the size of the capacitor electrode is reduced, resulting in a riskthat the sufficient capacitor cannot be ensured.

However, according to the configuration of the above embodimentillustrated in FIG. 7, because the pixel transistor channel electrode321 and the drive transistor channel electrode 331 are formed in thedifferent layers, the capacitor electrodes can be provided in therespective layers, and the size of the capacitor electrodes in therespective layers can increase. Also, because the source or drain of thepixel transistor 220 forms the gate of another drive transistor, thereis no need to provide the jumper wiring 317 of FIG. 10, and the wiringand the manufacturing process can be provided with high efficiency.Therefore, in a circuit within the sub-pixel 212, the more stablepotential difference can be retained, the display can be performed withthe higher quality, and the yield can be improved.

FIG. 11 is a diagram illustrating a first modification of the aboveembodiment from the same view field as that in FIG. 7. The firstmodification is different from the above embodiment in that the secondcapacitor electrode 322 and the third capacitor electrode 341 extend toa region overlapping with the high reference potential line 311, and theother configuration is identical with that of FIG. 7. With the provisionof the second capacitor electrode 322 and the third capacitor electrode341 which overlap with the high reference potential line 311 appliedwith the constant potential in this way, the potential retained by thesecond capacitor electrode 322 and the third capacitor electrode 341 canbe more stabilized with the results that the display can be performedwith the higher quality. Also, in the first modification, aconfiguration having no third capacitor electrode 341 can be provided,and in this case, with a configuration in which only the secondcapacitor electrode 322 overlaps with the high reference potential line311, the potential can be stabilized, and the display can be performedwith high quality.

FIG. 12 is a diagram illustrating a second modification of the aboveembodiment from the same view field as that in FIG. 7. The secondmodification is different from the above embodiment in that the contacthole 394 is not provided, the first capacitor electrode 332 is notconnected to the image signal line 312, and instead the first capacitorelectrode 332 is connected to the organic EL element 130 side (drainside of the drive transistor 230 if the drive transistor 230 is formedof a p-type semiconductor) of the drive transistor channel electrode331. With the above configuration, the first capacitor electrode 332,the second capacitor electrode 322, and the third capacitor electrode341 form the capacitor 242 in the circuit diagram of FIG. 6. Even if thecapacitor 242 is formed as a larger capacitor, the potential differencecan be more stably retained, and the display can be performed with thehigher quality. Therefore, the same advantages as those in the aboveembodiment can be obtained. Also, in the second modification of FIG. 12,as with the first modification of FIG. 11, the second capacitorelectrode 322 and the third capacitor electrode 341 may be formed tooverlap with the high reference potential line 311. In this case, thesame advantages as those in the first modification can be obtained.Also, in the second modification, a configuration having no thirdcapacitor electrode 341 can be provided. If the drive transistor 230 ismade of an n-type semiconductor, the first capacitor electrode 332 isconnected to the source side of the drive transistor 230.

Second Aspect of Present Invention

Hereinafter, the respective embodiments according to the second aspectof the invention will be described with reference to the drawings.Meanwhile, the description is merely an example, and a matter, such asan appropriate change without departing the spirit of the invention,which can be easily conceived by those skilled in the art is surelyincluded in the scope of the present invention. It should be noted thatin order to facilitate understanding of the description, width,thickness, and shape of each portion are schematically shown as comparedwith those actually used in some cases; however, the drawings are merelyan example and thus the invention is not limited thereto. In addition,in the specification and drawings, the same constituent elements as inthe above-described drawings are given the same reference numerals, andthe specific description will be properly omitted.

First Embodiment

A configuration of a display device according to the first embodiment ofthe second aspect in the invention will be described with reference toFIG. 13 to FIG. 18.

Outline of Display Device

First, an outline of the display device according to the firstembodiment will be described with reference to FIG. 13 and FIG. 14. FIG.13 is a perspective view of the display device in the first embodimentaccording to the second aspect of the invention. In addition, FIG. 14 isa plan view of the display device in the first embodiment according tothe second aspect of the invention.

As illustrated in FIG. 13 and FIG. 14, the display device in the firstembodiment is provided with a light emitting element which is providedin each of a plurality of pixels, a substrate 1100 including a displayarea 1110 in which pixels 1180 are arranged in a matrix, a countersubstrate 1200 facing the substrate 1100, a driver IC 1300 which isprovided in an area to which the substrate 1100 is exposed, and aflexible printed circuit (FPC) 1400. The substrate 1100 is divided intoa display area 1110 and a peripheral area 1120 which is positionedaround the display area 1110. In the substrate 1100, the pixels 1180 arearranged in the display area 1110 in a matrix, and a pixel circuit,which will be described in the first embodiment, is disposed in each ofthe plurality of pixels 1180. The FPC 1400 is provided with a terminalportion 1500 connected to a controller circuit for controlling a drivingcircuit.

In reference with FIG. 14, in the display area 1110, a gate line 561 ona horizontal direction and a signal line 562 and a power line 563 on avertical direction are arranged in a matrix. The pixel 1180 correspondsto an area which is surrounded by the gate line 561, signal line 562,and power line 563. For the sake of description, FIG. 14 illustratessuch that the pixel 1180 does not overlap the area which is surroundedby the gate line 561, signal line 562, and power line 563; however, apixel area and the aforementioned lines may overlap with each other whenviewed from top.

Circuit Diagram of Pixel

Next, a pixel circuit of the first embodiment will be described withreference to FIG. 15.

As illustrated in FIG. 15, the pixel circuit of the first embodiment isformed of a capacitor C, thin film transistors TFT1 and TFT2, a gateline Vgate, a signal line Vsig, and a power line Vdd. Here, the TFT2 isdescribed as an n-type semiconductor. A gate of the TFT2 is connected tothe gate line Vgate, a source is connected to the signal line Vsig, anda drain is connected to one end of the capacitor C and the gate of theTFT1. When a predetermined voltage is applied to the gate of the TFT2,the TFT2 applies a potential in response to the signal line Vsig to thecapacitor C. A potential of the gate of the TFT1 is retained in thecapacitor C, and the gate of the TFT1 supplies a current correspondingto a charge of the capacitor C from the power line Vdd to an anode of anOLED. A cathode of the OLED is connected to a ground electrode or anelectrode of a negative potential.

Configuration of Pixel

Next, a structure and a forming method of the pixel in the firstembodiment will be described with reference to FIG. 16 to FIG. 19. FIG.16 to FIG. 19 are perspective plan views when viewed from the displayarea side of the display device, and illustrate an area 2×2 pixelsarranged in the vertical and horizontal directions.

FIG. 16 illustrates a state in which a low-temperature poly silicon(LIPS) layer 521, an oxide semiconductor layer 522, and an electrodelayer 535 are formed and disposed on the same insulating layer. The LIPSlayer 521 corresponds to a channel semiconductor layer of a TFT whichsupplies a current to the OLED from the power line, and the TFTcorresponds to the TFT1 shown in the circuit diagram of FIG. 15. Notethat, various types of polycrystalline silicon may be used instead ofthe LIPS layer 521. The oxide semiconductor layer 522 corresponds to achannel semiconductor layer of a TFT which applies a potential inresponse to the signal line to the capacitor, and the TFT corresponds tothe TFT2 shown in the circuit diagram of FIG. 15. Examples of a materialfor the oxide semiconductor layer 522 include an oxide such as indium,zinc, tin, and gallium. The electrode layer 535 is electricallyconnected to the power line thereafter, and forms an end of thecapacitor C shown in the circuit diagram of FIG. 15.

In the first embodiment, the LIPS layer 521 and the oxide semiconductorlayer 522 are formed on the same insulating layer; however, it ispreferable that the LIPS layer 521 is formed first, and then the oxidesemiconductor layer 522 is formed. The oxide semiconductor is formed byusing a DC sputtering method or the like, and can be formed at a lowtemperature compared with a case of the LTPS. Accordingly, the LTPSlayer 521 which is formed at a relatively high temperature is formedfirst, and then the oxide semiconductor layer 522 which can be formed ata relatively low temperature is formed, and therefore, it is possible toprevent a portion which can be formed at a low temperature from beingexposed to unnecessary high temperature environment, thereby suppressingthe influence by the high temperature.

FIG. 17 is a plan view illustrating a state in which an insulating layeris formed on the LTPS layer 521, the oxide semiconductor layer 522, andthe electrode layer 535 which are formed in FIG. 16, and a gate line 561and an electrode layer 536 are formed and disposed on the aforementionedinsulating layer. The gate line 561 is linearly formed in the horizontaldirection, and an area in which a portion which is extended in thevertical direction from the gate line 561 and the oxide semiconductorlayer 522 overlap with each other is formed. The electrode layer 536 is,thereafter, electrically connected to the drain of the TFT2 via a jumperwiring, and forms the other end of the capacitor C. The electrode layer535 and electrode layer 536 form the capacitor C at a portion in whichthe electrode layer 535 and electrode layer 536 overlap with each otherwith the insulating layer interposed therebetween.

FIG. 18 is a plan view illustrating a state in which an insulating layeris formed on the gate line 561 and electrode layer 536 which are formedin FIG. 17, and a signal line 562, a power line 563, and a jumper wiring564 are formed and disposed on the aforementioned insulating layer.

The signal line 562 is formed by extending in the vertical directionwhile being adjacent to the power line 563. The oxide semiconductorlayer 522 and the signal line 562 overlap with each other in an area,and are electrically connected to each other through a via 575 formed onthe area. In addition, the oxide semiconductor layer 522 is electricallyconnected to the jumper wiring 564 through a via 577, and the electrodelayer 536 is electrically connected to the jumper wiring 564 through avia 578. The gate of the TFT2 is formed in an area in which a portionwhich is extended in the vertical direction from the gate line 561 andthe oxide semiconductor layer 522 overlap with each other, and the via575 and the via 577 respectively correspond to a source electrode and adrain electrode.

The gate of the TFT1 is formed in an area in which the LTPS layer 521and the electrode layer 536 overlap with each other. The LTPS layer 521and the power line 563 are electrically connected to each other througha via 574, and an anode contact hole 571 is formed in the LTPS layer521, and a predetermined current is supplied to the OLED from the powerline 563.

The electrode layer 535 and the electrode layer 536 form an area inwhich the electrode layer 535 and electrode layer 536 overlap with eachother with the insulating layer interposed therebetween, and constitutethe capacitor C. When referring to the circuit diagram in FIG. 15, theelectrode layer 535 corresponds to an electrode on the power line Vddside of the capacitor C, and the electrode layer 536 corresponds to anelectrode on the drain of the TFT2 side and the gate of the TFT1 side ofthe capacitor C. The electrode layer 536 is electrically connected tothe jumper wiring 564 through a via 578, and thus, is electricallyconnected to the oxide semiconductor layer 522. The electrode layer 535is electrically connected to the power line 563 through a via 576 whichis formed in an area in which the electrode layer 535 overlaps the powerline 563.

FIG. 19 is a plan view illustrating a state in which a planarizationlayer is formed and then an anode 550 is formed on the signal line 562,the power line 563, and the jumper wiring 564 which are formed in FIG.18. The anode 550 is formed in a pixel area which is verticallysurrounded by the gate line 561, and horizontally surrounded by thesignal line 562 and the power line 563. A bank is formed so as tosurround the anode 550 and the anode contact hole 571, and an area whichis surrounded by a dotted line 551 is an opening portion.

As described in FIG. 13 to FIG. 19, in the first embodiment, twodifferent types of TFTs such as the TFT1 of which the channelsemiconductor layer is the LIPS, and the TFT2 of which the channelsemiconductor layer is the oxide semiconductor, are disposed on the sameinsulating layer. Here, when comparing leakage current properties of therespective TFT1 and TFT2, the leakage current of the TFT1 issubstantially equal to or less than 10⁻¹²A/μm per channel length of 1 μmwhile the leakage current of the TFT2 is substantially equal to or lessthan 10⁻¹⁶A/μm per channel length of 1 μm. From this result, it is foundthat the TFT2 is more excellent in the low leakage properties. In thefirst embodiment, the TFT2 which is excellent in the low leakageproperties (the TFT of which the channel semiconductor layer is theoxide semiconductor) is used as a TFT for writing a video signal intothe capacitor, and thus when retaining the video signal in thecapacitor, it is possible to prevent the leakage currents andunnecessary potentials, thereby suppressing variation of the videosignal. In the related art, in order to prevent the leakage current ofthe capacitor, a dual gate structure is employed in addition to a basicpixel circuit structure, or a large capacitor for preparing the leakagecurrent is disposed, but this results in disturbing a reduction in apixel area in accordance with high definition of the display device.However, since there is no need to employ the technique and structure inthe related art, the first embodiment focuses on the high definition ofthe display device.

On the other hand, when comparing mobility (moving amount of electron)of each of the TFT1 and the TFT2, the mobility of TFT1 is substantiallyequal to or greater than 100 cm²/Vs while the mobility of TFT2 issubstantially equal to or greater than 10 cm²/Vs. From this result, itis found that the TFT1 is more excellent in the mobility. Also in theTFT2, a threshold voltage (Vth) is easily changed. In the firstembodiment, the TFT1 (the TFT of which the channel semiconductor layeris the LIPS) which is excellent in the mobility and has great drivingperformance is used as a TFT for supplying the current corresponding tothe charge in the capacitor to the LED from the power line.

As such, in the first embodiment, it is possible to realize ahigh-quality operation of a high-definition pixel by perfectly disposingthe TFT which uses different elements in the pixel circuit in a suitableposition.

Second Embodiment

Next, a configuration of a display device according to the secondembodiment of the second aspect in the invention will be described withreference to FIG. 20 to FIG. 28. Note that, portions which are notspecifically mentioned are common in the second embodiment and the firstembodiment.

First, a structure of the display device and a forming method thereofaccording to the second embodiment will be described with reference toFIG. 20 to FIG. 24. Similar to FIG. 16 to FIG. 19, FIG. 20 to FIG. 24are perspective plan views when viewed from the display area side of thedisplay device, and illustrate an area 2×2 pixels arranged in thevertical and horizontal directions.

FIG. 20 illustrates a state in which a LIPS layer 521 and an electrodelayer 531 are formed on the same insulating layer. Here, the electrodelayer 531 may be obtained by disposing the same material as that of theLIPS layer 521 on the same insulating layer, then performing an ionimplantation process thereon, and then changing the properties thereofso as to have conductivity, alternatively, the electrode layer 531 maybeformed of a material different from that of the LIPS layer 521, andbeing separately formed from the LIPS layer 521.

FIG. 21 illustrates a state in which an insulating layer is formed onthe LIPS layer 521 and the electrode layer 531 which are formed in FIG.20, and an oxide semiconductor layer 522 and an electrode layer 532 areformed on the insulating layer. First, the oxide semiconductor layer 522is disposed such that a portion thereof overlaps the LIPS layer 521 andthe second electrode layer. The electrode layer 532 is formed bydisposing the oxide semiconductor layer 522, then performing an ionimplantation process or the like thereon by removing at least a portioncorresponding to the channel semiconductor layer of the TFT2, andchanging the properties thereof so as to have the conductivity. Aportion in which the electrode layer 532 and the LIPS layer 521 overlapwith each other corresponds to the gate electrode of the TFT1. Inaddition, a portion in which the electrode layer 532 and the electrodelayer 531 overlap with each other with the insulating layer interposedtherebetween corresponds to a portion of the capacitor C.

FIG. 22 illustrates a state in which an insulating layer is formed onthe oxide semiconductor layer 522 and electrode layer 532 which areformed in FIG. 21, and a gate line 561 and an electrode layer 533 aredisposed on the insulating layer. The gate line 561 is lineally formedin the horizontal direction, and an area in which a portion which isextended in the vertical direction from the gate line 561 and the oxidesemiconductor layer 522 overlap with each other is formed. The electrodelayer 533 is formed on and electrically connected to an area, of which aportion overlaps the electrode layer 531 but does not overlap theelectrode layer 532, through a via 572 which is formed on the area.Other areas of the electrode layer 533 except for the above area areformed on an area which substantially overlaps the electrode layer 532.The area in which the electrode layer 531 and the electrode layer 532overlap with each other with the insulating layer interposedtherebetween, and the area in which the electrode layer 532 and theelectrode layer 533 overlap with each other with the insulating layerinterposed therebetween constitute the capacitor C.

FIG. 23 is a diagram illustrating a state in which an insulating layeris formed on the gate line 561 and the third electrode layer 533 whichare formed in FIG. 22, and the signal line 562 and the power line 563are disposed on the insulating layer. The LTPS layer 521 and the powerline 563 are electrically connected to each other through the via 574which is formed in an area in which the LIPS layer 521 and the powerline 563 overlap with each other. In addition, the anode contact hole571 is formed on the LIPS layer 521. The oxide semiconductor layer 522and the signal line 562 are electrically connected to each other throughthe via 575 which is formed in an area in which the oxide semiconductorlayer 522 and the signal line 562 overlap with each other. The electrodelayer 531 and the power line 563 are electrically connected to eachother through the via 573 which is formed in an area in which theelectrode layer 531 and the power line 563 overlap with each other.

FIG. 24 is a plan view illustrating a state in which a planarizationlayer is formed on the signal line 562 and the power line 563 which areformed in FIG. 23, and then the anode 550 is formed on the planarizationlayer. The anode 550 is formed in a pixel area which is verticallysurrounded by the gate line 561, and horizontally surrounded by thesignal line 562 and the power line 563. A bank is formed so as tosurround the anode 550 and the anode contact hole 571, and an area whichis surrounded by a dotted line 551 is an opening portion.

As described above, also in the second embodiment as in the firstembodiment, the TFT2 of which the channel semiconductor layer is theoxide semiconductor is used as a TFT for writing a video signal to acapacitor, and the TFT1 of which the channel semiconductor layer is theLIPS is used as a TFT for supplying a current corresponding to a chargein the capacitor to the LED from the power line, and thus, it ispossible to realize a high-quality operation of a high-definition pixel.In addition, the LIPS layer 521 which is manufactured in a relativelyhigh temperature of manufacturing process is firstly formed on theinsulating layer positioned below, and thereafter, the oxidesemiconductor layer 522 which is manufactured in a relatively lowtemperature of manufacturing process is firstly formed on the insulatinglayer positioned above, and therefore, it is possible to prevent aportion which can be formed at a low temperature from being exposed tounnecessary high temperature environment, thereby suppressing theinfluence by the high temperature.

In addition, in the second embodiment, each of the channel semiconductorlayer of the TFT1 and the channel semiconductor layer of the TFT2 areformed on a different insulating layer, and the channel semiconductorlayer of the TFT2 corresponds to the gate of the TFT1. With this, amember corresponding to the jumper wiring 564 in the first embodiment isnot necessary, and thus it is possible to efficiently use a space in thepixel area.

Further, it is possible to efficiently use a space in the pixel area byforming the capacitor between channel semiconductor layers of therespective TFT1 and TFT2.

Cross-Sectional View

Next, a configuration of the display device according to the secondembodiment will be described with reference to FIG. 25 and FIG. 26.

FIG. 25 is a cross-sectional view taken along a line XXV-XXV of a pixelof the display device shown in FIG. 24. With reference to FIG. 25, aninsulating layer 541, an insulating layer 542, an insulating layer 543,an insulating layer 544, and a planarization layer 545 are sequentiallylaminated on the TFT substrate 540. Here, the TFT substrate 540 isformed of glass, a resin, or the like. In addition, the insulating layer541 is formed of an undercoat (an inorganic separation membrane) or thelike. The insulating layers 542 and 543 are formed of an inorganicmaterial such as a silicon nitride. The insulating layer 544 is formedof an inorganic material such as a silicon oxide. An organic materialsuch as acryl or polyimide is used as the planarization layer 545. Theanode 550 is formed on the planarization layer 545. The anode 550 has;for example, a structure in which oxide layers such as In and Zn arelaminated on an Ag layer. A bank 546 is formed so as to surround theportions on the anode 550. An organic material such as acryl orpolyimide is used as the bank 546.

In addition, when referring to FIG. 25, the respective electrode layers531, 532, and 533 are formed on the respective insulating layers 541,542, and 543, and these three layers of electrode layers determine acapacitance. The insulating layer 541 is also provided with the LTPSlayer 521 thereon. In addition, the electrode layer 532 is formed on theinsulating layer 542, and here, the oxide semiconductor layer 522 isdoped with impurities such that the properties are changed so as to havethe conductivity. Further, the gate line 561 is formed as well on theinsulating layer 543 in addition to the electrode layer 533. The gateline 561 is formed of, for example, a metallic material such as AL andMo, and the electrode layer 533 may be also formed of the same materialas that of the gate line 561.

FIG. 26 is a cross-sectional view taken along a line XXVI-XXVI of thepixel of the display device shown in FIG. 24. With reference to FIG. 26,the LIPS layer 521 is formed on the insulating layer 541, and iselectrically connected to the anode 550 via the anode contact hole 571.In addition, the power line 563 is formed on and is electricallyconnected to the insulating layer 544 through the via 574. Theinsulating layer 544 is also provided with the signal line 552 thereon.The signal line 562 and the power line 563 are formed of, for example, ametallic material such as Ti and Al.

Modification 1

Next, Modification 1 of the second embodiment will be described withreference to FIG. 27. In Modification 1, it is found that the electrodelayer 532 and the electrode layer 533 are formed to be extended to anarea Cl in which the electrode layer 532 and the electrode layer 533overlap the power line 563 disposed on the right side of the pixel. Inthis way, when forming an area, in which the power line 563 and theelectrode layers 531, 532, and 533 overlap with each other, on the lowerside of the power line 563, it is possible to secure a large area inwhich the capacitor is formed as compared with the second embodiment.Note that, as an application example of Modification 1, it is possibleto form an area in which the electrode layers 531, 532, and 533 overlapthe signal line 562 on the left side of the pixel without overlappingthe power line 563 on the right side of the pixel.

Modification 2

Next, Modification 2 of the second embodiment will be described withreference to FIG. 28. In Modification 2, it is found that an area C2 inwhich the electrode layers 531, 532, and 533 overlap not only the powerline 563 which is disposed on the right side of the pixel but also thesignal line 562 which is disposed on the right side of the power line563 is formed. It is found that it is possible to secure a large area inwhich the capacitor is formed as compared with Modification 1.Meanwhile, FIG. 27 illustrates an example of forming an area in whichthe power line 563 and the signal line 562 on the right side of thepixel overlap the electrode layers 531, 532, and 533; however, as anapplication example of Modification 2, an area in which the electrodelayers 531, 532, and 533 overlap each of the signal line 562 on the leftside of the pixel and the power line 563 on the left side of the pixelmay be formed, or an area in which the electrode layers 531, 532, and533 overlap each of the signal line 562 on the left side of the pixeland the power line 563 on the right side of the pixel may be formed.

Third Embodiment

FIG. 29 is a plan view of a pixel circuit of a display device in thethird embodiment according to the second aspect of the invention. FIG.30 is a cross-sectional view taken along a line XXX-XXX of the pixelcircuit shown in FIG. 29. FIG. 31 is a cross-sectional view taken alonga line XXXI-XXXI of the pixel circuit shown in FIG. 29. FIG. 32 is across-sectional view taken along a line XXXII-XXXII of the pixel circuitshown in FIG. 29. Meanwhile, the pixel circuit shown in FIG. 15 is alsoapplicable to the third embodiment.

The display device according to the third embodiment includes at leasttwo thin film transistors (the first transistor TFT1 and the secondtransistor TFT2) , which are a type of a field effect transistor, oneach pixel.

A channel semiconductor layer 610 a of the first transistor TFT1 is aportion of a first layer 610. The first layer 610 is formed ofpolycrystalline silicon of which at least one portion is doped withimpurities. Since the polycrystalline silicon is used, the firsttransistor TFT1 is excellent in the current driving performance. Thefirst transistor TFT1 controls the current between a power line 602 andan anode 604. That is, one of the sources and the drain of the firsttransistor TFT1 is connected to the power line 602 in the contactportion 602 a, and the other one of the source and the drain of thefirst transistor TFT1 is connected to an anode 604 in contact portions604 a and 630 a. Note that, the anode 604 has an end portion which iscovered by a bank 606.

The first layer 610 is separated from the channel semiconductor layer610 a of the first transistor TFT1, and includes a conductive layer 610b which has high conductivity compared with the channel semiconductorlayer 610 a of the first transistor TFT1. The conductivity is adjustedby the amount of doping impurities. The conductive layer 610 b isconnected to the power line 602 in a contact portion 602 b.

A channel semiconductor layer 620 a of the second transistor TFT2 is aportion of a second layer 620. The second layer 620 is formed of anoxide semiconductor of which at least a portion is doped withimpurities. Since the oxide semiconductor is used, the second transistorTFT2 is excellent in the low leakage properties. The second transistorTFT2 includes two gate electrodes (top gates) which are formed of aportion of a gate line 608 through which a scanning signal is input. Thegate line 608 is formed of metal. The second transistor TFT2 iscontrolled by the scanning signal.

The second layer 620 includes a conductive layer 620 b which has highconductivity compared with the channel semiconductor layer 620 a of thesecond transistor TFT2. The second layer 620 continuously includes thechannel semiconductor layer 620 a and the conductive layer 620 b. Aportion of the conductive layer 620 b which is included in the secondlayer 620 is the gate electrode (the top gate) with respect to thechannel semiconductor layer 610 a of the first transistor TFT1. Thesecond layer 620 is connected to a signal line 612 through which a videosignal is input in a contact portion 612 a, and the first transistorTFT1 is controlled by the video signal which is switched in the secondtransistor TFT2.

As illustrated in FIG. 30, the other portion of the conductive layer 620b which is included in the second layer 620 and the conductive layer 610b which is included in the first layer 610 by being separated from thefirst transistor TFT1 overlap with each other, and a capacitance C1 isformed between the other portion of the conductive layer 620 b and theconductive layer 610 b. In addition, a metal layer 614 which isconnected to the conductive layer 610 b of the first layer 610 in acontact portion 614 a overlaps above the conductive layer 620 b of thesecond layer 620, and a capacitance C2 is formed therebetween.

At least one layer of insulating layer 616 is interposed between thefirst layer 610 and the second layer 620. That is, the first layer 610and the second layer 620 are positioned in a different layer. Thedescription for other insulating layers is the same as described in theabove-described embodiment.

A light shielding layer 630 is provided so as to cover at least one(both in this example) of channel semiconductor layers 610 a and 620 aof the first transistor TFT1 and the second transistor TFT2. Since theoxide semiconductor which is a main raw material of the channelsemiconductor layer 620 a of the second transistor TFT2 is transparent,and absorbs ultraviolet rays, it is preferable to provide the lightshielding layer 630. In addition, it is preferable that a thin filmtransistor which is positioned below or in the vicinity of the lightemitting layer (not shown) which emits blue light having a wave lengthclose to ultraviolet rays is shielded from the light through the lightshielding layer 630. Alternatively, if white light is emitted from theentirety of pixels, it is preferable that the thin film transistor inthe entirety of pixels is covered with the light shielding layer 630.

The light shielding layer 630 is the source or the drain of the firsttransistor TFT1, and is connected to the side opposite to the side towhich the power line 602 is connected. Since the contact portion 604 aof the anode 604 is provided so as to overlap the contact portion 630 aof the light shielding layer 630, the anode 604 is connected to thepower line 602 via the first transistor TFT1. The description for othercontents is the same as described in the above-described embodiment.

Fourth Embodiment

FIG. 33 is a plan view of a pixel circuit of a display device in thefourth embodiment according to the second aspect of the invention. FIG.34 is a cross-sectional view taken along a line XXXIV-XXXIV of the pixelcircuit shown in FIG. 33.

In the fourth embodiment, the first layer 610 includes the channelsemiconductor layer 610 a for forming the first transistor TFT1, and aconductive layer 640 which is separated from the channel semiconductorlayer 610 a on the same insulating layer 618 (that is, positioned on thesame layer). Further, the conductive layer 640 is divided into a firstconductive layer 640 a and a second conductive layer 640 b.

The first conductive layer 640 a is connected to the gate line 608, andcorresponds to a gate electrode (a bottom gate) of the second transistorTFT2. The second conductive layer 640 b has the same function as that ofthe conductive layer 610 b described in the third embodiment, and thusthe description thereof will be omitted. Other contents thereofcorrespond to the contents described in the third embodiment and otherembodiments.

Fifth Embodiment

FIG. 35 is a plan view of a pixel circuit of a display device in thefifth embodiment according to the second aspect of the invention. FIG.36 is a cross-sectional view taken along a line XXXVI-XXXVI of the pixelcircuit shown in FIG. 35.

In the fifth embodiment, a portion of the gate line 608 is positionedbelow the channel semiconductor layer 620 a of the second layer 620, andcorresponds to the gate electrode (the bottom gate) of the secondtransistor TFT2.

The conductive layer 610 b of the first layer 610, which is separatedfrom the channel semiconductor layer 610 a is connected to theconductive layer 620 b of the second layer 620. Specifically, theinsulating layers 650 and 652 are interposed between the first layer 610and the second layer 620, and the conductive layer 610 b and theconductive layer 620 b communicate with each other by the contactportion 656 which passes through the insulating layers 650 and 652.

The metal layer 654 is interposed between the conductive layer 610 b andthe conductive layer 620 b (between the insulating layers 650 and 652)which communicate with each other, and the metal layer 654 is connectedto the power line 602 in the contact portion 654 a. The capacitance Clis formed between the conductive layer 610 b and the metal layer 654,and the capacitance C2 is formed between the conductive layer 620 b andthe metal layer 654.

The metal layer 654 is formed so as to avoid above the channelsemiconductor layer 610 a of the first transistor TFT1. Since twoinsulating layers 650 and 652 are interposed between the first layer 610and the second layer 620, a through hole 650 a is formed on theinsulating layer 650 positioned above, and the conductive layer 620 b isplaced on the insulating layer 652 positioned below, and thus theconductive layer 620 b is positioned above the channel semiconductorlayer 610 a of the first layer 610, and corresponds to the gateelectrode (the top gate) of the first transistor TFT1. Other contentsthereof correspond to the contents described in the third embodiment andother embodiments.

Sixth Embodiment

FIG. 37 is a plan view of a pixel circuit of a display device in thesixth embodiment according to the second aspect of the invention. FIG.38 is a cross-sectional view taken along a line XXXVIII-XXXVIII of thepixel circuit shown in FIG. 37.

In the sixth embodiment, the first layer 610 includes the channelsemiconductor layer 610 a for forming the first transistor TFT1, and theconductive layer 640 which is separated from the channel semiconductorlayer 610 a on the same insulating layer 618 (that is, positioned on thesame layer). Further, the conductive layer 640 is divided into the firstconductive layer 640 a and the second conductive layer 640 b. The firstconductive layer 640 a is connected to the gate line 608, andcorresponds to the gate electrode (the bottom gate) of the secondtransistor TFT2. Further, a portion of the gate line 608 overlaps abovethe channel semiconductor layer 620 a of the second layer 620, andcorresponds to the gate electrode (the top gate) of the secondtransistor TFT2. The second conductive layer 640 b has the same functionas that of the conductive layer 610 b described in the third embodiment,and thus the description thereof will be omitted. Other contents thereofcorrespond to the contents described in the third embodiment and otherembodiments.

Seventh Embodiment

FIG. 39 is a plan view of a pixel circuit of a display device in theseventh embodiment according to the second aspect of the invention. FIG.40 is a cross-sectional view taken along a line XL-XL of the pixelcircuit shown in FIG. 39.

In the seventh embodiment, the conductive layer 620 b of the secondlayer 620 overlaps above the channel semiconductor layer 610 a of thefirst transistor TFT1 and corresponds to the gate electrode (the topgate). In addition, another metal layer 660 which is connected to theconductive layer 620 b of the second layer 620 overlaps above thechannel semiconductor layer 610 a of the first transistor TFT1, andcorresponds to the gate electrode (the top gate). That is, two gateelectrodes are provided so as to overlap with each other.

In this example, the metal layer 660 extends in one side of lengthdirection (a direction between the source and drain) of the channelsemiconductor layer 610 a of the first transistor TFT1 from the contactportion 662 through which the metal layer 660 is connected to theconductive layer 620 b of the second layer 620. The other end of themetal layer 660 is positioned above the conductive layer 620 b of thesecond layer 620, and thus it is possible to release the electric fieldeffect of the end portion of the gate electrode and to thereby suppressthe characteristic fluctuation. With this, it is possible to realize thedisplay device with a high quality and high reliability.

The metal layer 660 and the conductive layer 620 b of the second layer620 are connected to each other via a hole which is formed on theinsulating layer 664 interposed between the metal layer 660 and theconductive layer 620 b of the second layer 620; however, the insulatinglayer 664 maybe omitted. Other contents thereof correspond to thecontents described in the third embodiment and other embodiments.

Eighth Embodiment

FIG. 41 is a plan view of a pixel circuit of a display device in theeighth embodiment according to the second aspect of the invention. FIG.42 is a cross-sectional view taken along a line XLII-XLII of the pixelcircuit shown in FIG. 41.

This example is different from the example in the seventh embodiment inthat the metal layer 660 extends in both sides of length direction (adirection between the source and drain) of the channel semiconductorlayer 610 a of the first transistor TFT1 from the contact portion 662through which the metal layer 660 is connected to the conductive layer620 b of the second layer 620. The center portion of the metal layer 660is positioned above the conductive layer 620 b of the second layer 620.Other contents thereof correspond to the contents described in theseventh embodiment and other embodiments.

Ninth Embodiment

FIG. 43 is a plan view of a display device in the ninth embodimentaccording to the second aspect of the invention.

The display device according to the ninth embodiment is provided with adriving circuit 702 (for example, a scanning circuit) in a peripheralarea surrounding a display area 700 in which an image is displayed. Inthe pixel circuit of the display area 700, the channel semiconductorlayer of the above-described second transistor TFT2 is formed by usingthe oxide semiconductor. On the other hand, in the driving circuit 702,the channel semiconductor layer of the transistor is formed by using thepolycrystalline silicon. In addition, in the entire display device, thepolycrystalline silicon is used for the transistor which requires highdriving performance. Although not shown in the drawings, a wiringmaterial of the pixel circuit of the driving circuit 702 may be the sameas that of the peripheral area of the display area 700.

Although the oxide semiconductor and the polycrystalline silicon aremanufactured at a different process temperature, it is easy to form atransistor as long as the oxide semiconductor is used in the displayarea 700, and the polycrystalline silicon is used in the peripheralarea. For example, it is possible to shorten the process working time bylocally performing laser activation.

While there have been described what are at present considered to becertain embodiments of the invention, it will be understood that variousmodifications maybe made thereto, and it is intended that the appendedclaims cover all such modifications as fall within the true spirit andscope of the invention.

What is claimed is:
 1. A display device comprising: a substrate; aplurality of pixels; each of the pixels including a firstpolycrystalline silicon layer, a second polycrystalline silicon layer,an oxide semiconductor layer, a first electrode, a second electrode, andan emitting element, and a first insulation layer, a second insulationlayer, and a third insulation layer which cover the pixels, wherein, thefirst polycrystalline silicon layer is on the substrate, the secondpolycrystalline silicon layer is on the substrate, the first insulationlayer is on the first polycrystalline silicon layer and the secondpolycrystalline silicon layer, the oxide semiconductor layer is on thefirst insulation layer, the second insulation layer is on the oxidesemiconductor layer, the first electrode is on the second insulationlayer, the second electrode is on the second insulation layer, the thirdinsulation layer is on the first electrode and the second electrode, theemitting element is on the third insulation layer, each of the pixelsincludes: a first transistor; a second transistor connected to the firsttransistor and the emitting element; and a capacitor connected to thesecond transistor, the oxide semiconductor layer of each of the pixelshas a first plane region, a second plane region, and a third planeregion, the first plane region of the oxide semiconductor layer is afirst channel region of the first transistor, the second plane region ofthe oxide semiconductor layer is a second gate electrode of the secondtransistor, the third plane region of the oxide semiconductor layer is afirst capacitor electrode of the capacitor, a first gate insulation filmof the first transistor is made of the second insulation layer andoverlaps the first plane region of the oxide semiconductor layer, asecond gate insulation film of the second transistor is made of thefirst insulation layer and overlaps the second plane region of the oxidesemiconductor layer, a first capacitor insulation film of the capacitoris made of the first insulation layer and overlaps the third planeregion of the oxide semiconductor layer, a first gate electrode of thefirst transistor is made of the first electrode and overlaps the firstplane region of the oxide semiconductor layer, a second channel regionof the second transistor is made of the first polycrystalline siliconlayer and overlaps the second plane region of the oxide semiconductorlayer, a second capacitor electrode of the capacitor is made of thesecond polycrystalline silicon layer and overlaps the third plane regionof the oxide semiconductor layer, a second capacitor insulation film ofthe capacitor is made of the second insulation layer and overlaps thethird plane region of the oxide semiconductor layer, a third capacitorelectrode of the capacitor is made of the second electrode, is connectedto the second capacitor electrode, and overlaps the third plane regionof the oxide semiconductor layer, and the emitting element overlaps thesecond plane region and the third plane region of the oxidesemiconductor layer.
 2. The display device according to claim 1, furthercomprising: a signal line on the third insulation layer; a power supplyline on the third insulation layer; and a fourth insulation layer on thesignal line and the power line, wherein the fourth insulation layer isarranged between the emitting element and the signal line, the powersupply line is connected to the first and second polycrystalline siliconlayers, and the signal line is connected to the oxide semiconductorlayer.
 3. The display device according to claim 1, wherein the oxidesemiconductor layer includes an oxide with at least one of an indium, azinc, a tin, and gallium.
 4. A display device comprising: a substrate; aplurality of pixels; each of the pixels including a first polycrystalline silicon layer, a second poly crystalline silicon layer, afirst oxide semiconductor layer, a second oxide semiconductor layer, afirst metal electrode, a second metal electrode, a third metalelectrode, and an emitting element, and a first insulation layer, asecond insulation layer, and a third insulation layer which cover thepixels, wherein, the first poly crystalline silicon layer is on thesubstrate, the second poly crystalline silicon layer is on thesubstrate, the first insulation layer is on the first poly crystallinesilicon layer and the second poly crystalline silicon layer, the firstand second metal electrodes and the second oxide semiconductor layer areon the first insulation layer, the second insulation layer is on thefirst and second metal electrodes, the first oxide semiconductor layeris on the second insulation layer, the third insulation layer is on thefirst oxide semiconductor layer and the second oxide semiconductorlayer, the third metal electrode is on the third insulation layer, theemitting element is on the third metal electrode, each of the pixelsincludes: a first transistor; a second transistor; and a capacitor, eachof the pixels has a first plane region, a second plane region, and thethird plane region, the first oxide semiconductor layer includes aportion overlapping the first plane region and being a first channelregion of the first transistor, the second insulation layer includes aportion overlapping the first plane region and being a first gateinsulation film of the first transistor, the first metal electrodeoverlapping the first plane region is a first gate electrode of thefirst transistor, the second oxide semiconductor layer includes aportion overlapping the second plane region and being a second gateelectrode of the second transistor, the first insulation layer includesa portion overlapping the second plane region and being a second gateinsulation film of the second transistor, the first poly crystallinesilicon layer includes a portion overlapping the second plane region andbeing a second channel region of the second transistor, the second metalelectrode includes a portion overlapping the third plane region andbeing a first capacitor electrode of the capacitor, the first insulationlayer includes a portion overlapping the third plane region and being afirst capacitor insulation film of the capacitor, the second polycrystalline silicon layer includes a portion overlapping the third planeregion and being a second capacitor electrode of the capacitor, a firstthickness of the third metal electrode is thicker than a secondthickness of the first poly crystalline silicon layer, than a thirdthickness of the second poly crystalline silicon layer, than a fourththickness of the first oxide semiconductor layer, than a fifth thicknessof the second oxide semiconductor layer, than a sixth thickness of thefirst metal electrode, and than a seventh thickness of the second metalelectrode, and the third metal electrode overlaps the first channelregion of the first transistor.
 5. The display device according to claim1, wherein the first oxide semiconductor layer includes an oxide with atleast one of an indium, a zinc, a tin, and gallium, and the second oxidesemiconductor layer includes an oxide with at least one of an indium, azinc, a tin, and gallium.
 6. The display device according to claim 1,wherein the first and second oxide semiconductor layers are locatedcontinuously.
 7. The display device according to claim 1, wherein thethird metal electrode overlaps the second gate electrode.
 8. The displaydevice according to claim 1, further comprising a third oxidesemiconductor layer, wherein the first to third oxide semiconductorlayers are located continuously, the third oxide semiconductor layerincludes a portion overlapping the third plane region and being thefirst capacitor electrode of the capacitor, and the third oxidesemiconductor layer is connected to the second poly crystalline siliconlayer.
 9. The display device according to claim 1, wherein the emittingelement overlaps the first and second capacitor electrodes.
 10. Thedisplay device according to claim 1, wherein each of the pixels includesa fourth metal electrode on the third insulation layer, the thirdinsulation layer has a contact hole, and a portion of the fourth metalelectrode is arranged in the contact hole and is in contact with thefirst oxide semiconductor layer.
 11. A display device comprising: asubstrate; a plurality of pixels; and a first insulation layer, a secondinsulation layer, and a third insulation layer which cover the pixels,wherein each of the pixels including: an emitting element; a first polycrystalline silicon layer with a first channel portion; a second polycrystalline silicon layer; an oxide semiconductor layer with a secondchannel portion; a first transistor with the first channel portion and afirst gate electrode portion; a second transistor with the secondchannel portion and a second gate electrode portion; a first metalelectrode including the second gate electrode portion; a second metalelectrode; and a pixel electrode, the first poly crystalline siliconlayer is on the substrate, the second poly crystalline silicon layer ison the substrate, the first and second poly crystalline silicon layersare located at a same layer, the first insulation layer is on the firstpoly crystalline silicon layer and the second poly crystalline siliconlayer, the first gate electrode portion and the second channel portionare on the first insulation layer, the second insulation layer is on thefirst gate electrode portion and the second channel portion, the firstmetal electrode is on the second insulation layer, the third insulationlayer is on the first metal electrode, the second metal electrode is onthe third insulation layer, the pixel electrode is above the secondmetal electrode, and the second metal electrode overlaps the first polycrystalline silicon layer and the second channel portion.
 12. Thedisplay device according to claim 1, wherein the oxide semiconductorlayer includes an oxide with at least one of an indium, a zinc, a tin,and gallium.
 13. The display device according to claim 1, wherein oxidesemiconductor layer includes the first gate electrode portion, and thesecond channel portion and the first gate electrode portion are locatedcontinuously.
 14. The display device according to claim 1, wherein eachof the pixels includes a capacitor, and the pixel electrode overlaps thecapacitor and the second metal electrode.
 15. The display deviceaccording to claim 1, further comprising a fourth insulation layerbetween the second metal electrode and the pixel electrode, wherein thefirst to third insulation layers have a first contact hole, a firstportion of the second metal electrode is arranged in the first contacthole and is in contact with the first poly crystalline silicon layer,the fourth insulation layer has a second contact hole, a second portionof the pixel electrode is arranged in the second contact hole and is incontact with the second metal electrode.
 16. The display deviceaccording to claim 15, wherein the first contact hole is arrangeddirectly below the second contact hole, and a part of the second portionis arranged in the first contact hole.
 17. The display device accordingto claim 1, wherein the second metal electrode overlaps the firstchannel portion.